发明名称 Method for manufacturing semiconductor device
摘要 A method for manufacturing a semiconductor device having steps of forming an amorphous semiconductor on a substrate having an insulating surface; patterning the amorphous semiconductor to form plural first island-like semiconductors; irradiating a linearly condensed laser beam on the plural first island-like semiconductors while relatively scanning the substrate, thus crystallizing the plural first island-like semiconductors; patterning the plural first island-like semiconductors that have been crystallized to form plural second island-like semiconductors; forming plural transistors using the plural second island-like semiconductors; and forming a unit circuit using a predetermined number of the transistors, where the second island-like semiconductors used for the predetermined number of the transistors are formed from the first island-like semiconductors that are different from each other.
申请公布号 US2007004104(A1) 申请公布日期 2007.01.04
申请号 US20060514973 申请日期 2006.09.05
申请人 发明人 AZAMI MUNEHIRO;KOKUBO CHIHO;SHIGA AIKO;ISOBE ATSUO;SHIBATA HIROSHI;YAMAZAKI SHUNPEI
分类号 H01L21/84 主分类号 H01L21/84
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