发明名称 |
Semiconductor device-inspecting apparatus and semiconductor device-inspecting method |
摘要 |
An inspection apparatus for inspecting a pattern on a semiconductor substrate is provided and includes: an inspection unit having an objective lens for the inspecting; a table supporting a semiconductor substrate, the table being capable of rotating with respect to the inspection unit; and a position-controlling unit that rotates the table an angle relative to the inspection unit and fixes the table at a position of the angle.
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申请公布号 |
US2007003129(A1) |
申请公布日期 |
2007.01.04 |
申请号 |
US20060475071 |
申请日期 |
2006.06.27 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
MATSUDA JIRO |
分类号 |
G06K9/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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