发明名称 STRUCTURED MATERIALS AND METHODS
摘要 <p>In general, in one aspect, the invention features methods for forming structured materials that include providing a layer including a first material; patterning the layer while a surface of the layer is exposed without the need for a processing layer, such as a resist; permeating the patterned layer with a precursor; and reacting the precursor within the pattemed layer to form a structured material. ® KIPO & WIPO 2007</p>
申请公布号 KR20070001956(A) 申请公布日期 2007.01.04
申请号 KR20067016493 申请日期 2006.08.17
申请人 UNIVERSITY OF MASSACHUSETTS 发明人 WATKINS JAMES J.
分类号 B81B7/02;B81C99/00;G03F7/00;H01L21/027 主分类号 B81B7/02
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