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发明名称
VORRICHTUNG ZUR ABSCHEIDUNG DÜNNER FILME
摘要
申请公布号
DE60309900(D1)
申请公布日期
2007.01.04
申请号
DE20036009900
申请日期
2003.08.13
申请人
OXFORD INSTRUMENTS PLASMA TECHNOLOGY LTD.
发明人
GEORGE, CHRISTOPHER;WATSON, MICHAEL;KNIGHT, ROBERT;HALSALL, BRIAN;JOLLY, TIMOTHY
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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