| 摘要 |
A stocker system is provided to improve the accuracy of insertion of a cassette and prevent collision between a stocker and the cassette by attaching a sensor to a cassette table, thereby improving the reliability of an equipment, preventing an accident, and reducing human power. A cassette(102) is loaded with a plurality of substrates(111). A cassette table(115) is installed to secure and support the cassette. A stocker has a plurality of shelves for storing the cassette. A rack master(104) moves the cassette into and out of the shelves. A rack master arm plate(108) is connected with the rack master for putting the cassette on the rack master arm plate. A sensor(130) is attached to the cassette table for measuring a distance with the shelves when the cassette moves in and out. A rack master controller calculates a compensation numerical value with the measured distance for adjusting the cassette into a right position.
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