| 摘要 |
A wire bonding apparatus 10 including an XYZ drive mechanism 20 for moving a bonding arm 21 that has a bonding capillary 24 at its tip end, an XYZ drive mechanism 30 for driving a plasma arm 31 that has a plasma capillary 40 having a high-frequency coil wound at its tip end portion end, a gas supply unit 60 for supplying gas to the plasma capillary, and a high-frequency power supply unit 80 for supplying high-frequency electric power to the high-frequency coil. With a supply of high-frequency electric power to the high-frequency coil, gas is being a plasma inside the plasma capillary and is ejected from its tip end against a bonding subject 8, thus performing surface treatment on the bonding subject; and using the bonding capillary, bonding is performed interconnectedly with this surface treatment.
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