| 发明名称 |
HELICON PLASMA SOURCE WITH PERMANENT MAGNETS |
| 摘要 |
<p>A helicon plasma source has a discharge tube, a radio frequency antenna disposed proximate the discharge tube, and a permanent magnet positioned with respect to the discharge tube so that the discharge tube is in a far-field region of a magnetic field produced by the permanent magnet.</p> |
| 申请公布号 |
WO2007002455(A2) |
申请公布日期 |
2007.01.04 |
| 申请号 |
WO2006US24565 |
申请日期 |
2006.06.23 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;CHEN, FRANCIS, F. |
发明人 |
CHEN, FRANCIS, F. |
| 分类号 |
H01J27/18 |
主分类号 |
H01J27/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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