| 摘要 |
An apparatus for fixing functional material on a substrate is provided to accurately fix the material on desired portion of the substrate, rapidly dry liquid droplets, inhibit heating of overall the substrate and avoid deviation or disconnection of alignment caused from expansion of the substrate by fabricating a liquid droplet ejecting device and a liquid droplet drying, and fixing device in the apparatus. The apparatus(100) comprises: a substrate carriage for placing a substrate(132) thereon; a liquid storage tank(110); a head(120) with nozzles to eject liquid droplets to the substrate; a light source for emitting light to the ejected liquid droplets and forming functional material fixed to the substrate; a sintering device for sintering the fixed functional material and forming a functional film. The substrate carriage, the liquid storage tank, the liquid droplet ejecting head, and the light emission light source are integrated together to form the liquid droplet ejecting device. The light source comprises a reflective body and/or a diffraction optical device.
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