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发明名称
Methods of fabricating a semiconductor integrated circuit with thin film transistors using a selective epitaxial growth technique and a partial planarization technique and semiconductor integrated circuits fabricated thereby
摘要
申请公布号
KR100663349(B1)
申请公布日期
2007.01.02
申请号
KR20040071886
申请日期
2004.09.08
申请人
发明人
分类号
H01L27/11
主分类号
H01L27/11
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代理人
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