STAGE ASSEMBLY OF AN APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE

摘要

A stage assembly for a semiconductor device manufacturing apparatus is provided to load stably a semiconductor substrate on a stage in spite of the deviation of the substrate by using a predetermined sensor. A stage assembly for a semiconductor device manufacturing apparatus includes a stage and a predetermined sensor. The stage(210) has a flat upper surface capable of loading stably a semiconductor substrate. The predetermined sensor(240) is attached to a side of the stage. The predetermined sensor is capable of sensing the deviation of the substrate from the stage. The predetermined sensor is installed a lower side of the stage. The stage is formed like a cylinder type structure.