| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly integrated liquid feeder with a pump part and a valve part having simplest possible construction and function, using an electrochemical principle for controlling a trace amount of fluid to be fed. <P>SOLUTION: The liquid feeder comprises a reference pole/opposite pole substrate 1, an electrolyte accumulated plate 2, an operating pole substrate, a barrier membrane 4 and a flow path substrate 5 layered in sequence. The reference pole/opposite pole substrate 1 has a reference pole 10 and an operating pole 13 formed on the surface. The electrolyte accumulated plate 2 has an opening portion 8 in which electrolyte 9 is accumulated. The operating pole substrate 5 has a through-hole 12 on the inner face of which the operating pole 13 is formed. The barrier membrane 4 has a portion facing the through-hole 12 which is expandable in a diaphragm shape. The flow path substrate 5 has a valve hole 14 and a pump hole having a recessed cross section corresponding to a micro flow path 6 and the through-hole 12 for the expanded barrier membrane 4 to enter therein. <P>COPYRIGHT: (C)2007,JPO&INPIT |
