| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma treatment device capable of generating uniform atmospheric pressure plasma even in a state where a plasma generation space is tilted with respect to the horizontal direction. <P>SOLUTION: This atmospheric pressure plasma treatment device is provided with: a reaction part for ordinary pressure; a pair of first electrode 14 and a second electrode 15 arranged in the reaction part so as to face each other at a predetermined distance for defining the plasma generation space P; a gas supply means for supplying gas to the plasma generation space P; and a gas exhaust means 17 for exhausting the gas from the space P. Facing surfaces of the first and second electrodes 14 and 15 are each tilted so as to form a predetermined angle with respect to the horizontal direction. The gas supply means includes: a first supply part 18 for supplying the gas to the plasma generation space P from the first electrode 14 side: and a second supply part 19 for supplying the gas to the plasma generation space P from the second electrode 15 side. The first and second supply parts 18 and 19 respectively have a plurality of gas supply openings arranged so as to adjoin one another along the tilting direction of the facing surfaces of the first and second electrodes 14 and 15. <P>COPYRIGHT: (C)2007,JPO&INPIT |
