| 摘要 |
PROBLEM TO BE SOLVED: To provide a quality evaluation method of a crystal-grown ingot, which determines a cutting position and a sampling position of single-crystal ingot more reasonably and scientifically. SOLUTION: A quality evaluation method of a crystal-grown ingot includes a step of determining a cutting position and a sampling position, and a step of evaluating a sample, wherein the step of determining the cutting position and the sampling position includes (a) a step of inputting basic information for determining a cutting position, sampling position, and prime position for each equipment or product, (b) a step of predicting the cutting position, sampling position, and prime position according to the basic information, (c) a step of monitoring a growing process of an ingot, and analyzing and storing an X factor associated with growth of the ingot, and (d) a step of determining the cutting position and the sampling position reflecting the basic information and the X factor. COPYRIGHT: (C)2007,JPO&INPIT |
