POLISHING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a polishing tool suitable to precisely polish a hard and brittle material such as ceramics and a composite comprising ceramics at grinding wheel peripheral velocity up to 160 m/s. SOLUTION: This polishing tool includes a grinding wheel core 2 mounted on a dense metal bonded superabrasive segment 8 by a thermally stable bond 6. The tool favorable for back grinding of a ceramic wafer includes a graphite filler and abrasive 4 of a comparatively low degree of concentration. COPYRIGHT: (C)2007,JPO&INPIT