| 摘要 |
Included are a passage-forming substrate in which pressure generating chambers communicating respectively with nozzle orifices from which to eject ink droplets are formed; piezoelectric elements which are provided to one surface of the passage-forming substrate, and each of which is configured of a lower electrode, a piezoelectric layer and an upper electrode; and an insulation film which are provided at least areas corresponding to the piezoelectric elements in order that the insulation film can cover the piezoelectric elements, and which is made of an aluminum oxide thin film containing nitrogen.
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