| 摘要 |
PROBLEM TO BE SOLVED: To realize an interferometer system and a method of an optical interferometry for measuring a moving body, which carry out the optical interferometry for a test body having an object section to be measured which is moved sequentially. SOLUTION: The interferometer system comprises: a synchronous signal generating section 43 for setting up an instantaneous photographing period so as to fall within a light reception acceptable period of a photographing surface 33; and an AOM 13 and an AOM driver 14 which are used for irradiating the test body 7 with a measurement light beam emitted from a semiconductor laser light source 11 only during the instantaneous photographing period. A photographing camera 32 acquires information of an interference pattern image having phase information of the test body 7 at the instantaneous photographing period, by using interference light received by the photographing surface 33 in the instantaneous photographing period. COPYRIGHT: (C)2007,JPO&INPIT
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