| 摘要 |
<P>PROBLEM TO BE SOLVED: To decrease an installation area of a vacuum processing apparatus having a plurality of vacuum chambers. <P>SOLUTION: The apparatus is equipped with a fixed processing chamber 24 and two movable vacuum spare rooms 28a, 28b. A gate valve 26 is provided in the processing chamber 24, and gate valves 30 are respectively provided in the vacuum spare rooms 28a, 28b. Each of the vacuum spare rooms 28a, 28b is moved in the Y direction by a spare room shifting mechanism 34. In periphery of the processing chamber gate valve 26, there is provided a vacuum seal body 54 which carries out a vacuum seal of a clearance G between the gate valves 26, 30 which are expandable and contractible and are mutually approached during expansion. Further, there is provided a substrate conveyance mechanism which conveys a substrate 2 between the processing chamber 24 and the vacuum spare rooms 28a, 28b approaching the processing chamber 24. <P>COPYRIGHT: (C)2007,JPO&INPIT |
