| 摘要 |
Semiconductor fabricating equipment having a chuck is provided to measure temperature of a wafer loaded on the chuck in real time by using plural temperature detecting members disposed on the chuck. Semiconductor fabricating equipment includes a process chamber(100) having an internal space, in which a certain semiconductor process is carried out, a chuck(110) disposed in the process chamber and having an upper surface, on which a wafer is loaded, and temperature detecting members(120) disposed in the chuck and spaced apart from each other to detect temperature of the loaded wafer. A protection member is disposed on the temperature detecting members.
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