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发明名称
METHOD FOR OPERATING VACUUM INSTALLATION UNDER PRESSURE CHANGES
摘要
申请公布号
KR100662240(B1)
申请公布日期
2006.12.28
申请号
KR20040103977
申请日期
2004.12.10
申请人
发明人
分类号
B65H5/02;B08B5/02;B08B5/04;B65H23/025;B65H27/00;C23C14/56;D06C3/06;D21G1/02;F16C13/00;H01L21/02
主分类号
B65H5/02
代理机构
代理人
主权项
地址
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