| 摘要 |
An assembly structure for disassembling a curtain from a showerhead easily is provided to prevent membrane from being deposited at the inside of a screw and to remove the screw easily when separating the curtain from the shower head. In the assembly structure for disassembling a curtain from a showerhead easily, a shower head(100) for spraying gas uniformly on the rear surface of a wafer is coupled with a curtain(120) fixed on the edge of the shower head(100) to prevent membrane from being deposited on a chamber wall. A screw(140) fixes and couples the shower head(100) and the curtain(120). The spacer(150) is installed around the screw(140) and prevents membrane from being deposited at the inside of the screw(140). Plural screws(140) are installed on the edge of the shower head(100).
|
