发明名称 ELASTIC BOUNDARY WAVE DEVICE AND METHOD OF ITS MANUFACTURE
摘要 An elastic boundary wave device having an improved conversion efficiency of an elastic wave generated by electrodes and which is not influenced by the parasitic resistance between the electrodes. Comb-shaped electrodes (3) are formed on a major surface of a piezoelectric first substrate (2). A dielectric film (5) having a smooth surface is formed on the major surface of the first substrate (2) so as to cover the comb-shaped electrodes (3), and a silicon base second substrate (6) is stuck to the dielectric film (5). <IMAGE>
申请公布号 EP0920129(B1) 申请公布日期 2006.12.27
申请号 EP19980919491 申请日期 1998.05.06
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MISHIMA, NAOYUKI
分类号 H03H9/145;H03H9/02;H03H9/25;H03H9/64 主分类号 H03H9/145
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