发明名称 |
Surfactant-enhanced protection of micromechanical components from galvanic degradation |
摘要 |
A microelectromechanical structure is formed by depositing sacrificial and structural material over a substrate to form a structural layer on a component electrically attached with the substrate. The galvanic potential of the structural layer is greater than the galvanic potential of the component. At least a portion of the structural material is covered with a protective material that has a galvanic potential less than or equal to the galvanic potential of the component. The sacrificial material is removed with a release solution. At least one of the protective material and release solution is surfactanated, the surfactant functionalizing a surface of the component.
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申请公布号 |
US7153440(B2) |
申请公布日期 |
2006.12.26 |
申请号 |
US20020242213 |
申请日期 |
2002.09.12 |
申请人 |
PTS CORPORATION |
发明人 |
STAPLE BEVAN;BURIAK JILLIAN |
分类号 |
C23F1/00;B81B3/00;B81C1/00 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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