发明名称 |
Re-circulation and reuse of dummy-dispensed resist |
摘要 |
The present invention provides a system and methodology for dummy-dispensing resist though a dispense head while mitigating waste associated with the dummy-dispense process. The dummy dispensed resist is returned to a reservoir from which it was taken. Between substrate applications, the dispense head can be positioned to dispense resist into a return line. The flow of resist from the dispense head keeps resist from drying at the dispense head. By funneling the dummy-dispensed resist into a return line with low volume, for example, waste from the dummy-dispensing process can be mitigated.
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申请公布号 |
US7153364(B1) |
申请公布日期 |
2006.12.26 |
申请号 |
US20010000208 |
申请日期 |
2001.10.23 |
申请人 |
ADVANCE MICRO DEVICES, INC. |
发明人 |
RANGARAJAN BHARATH;SUBRAMANIAN RAMKUMAR;PHAN KHOI A.;QUINTO URSULA Q.;TEMPLETON MICHAEL K. |
分类号 |
B05B1/28;B05B3/00;B05B15/04 |
主分类号 |
B05B1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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