PREPARATION OF GRANULAR POLYCRYSTALLINE USING FLUIDIZED BED REACTOR

摘要

A polysilicon manufacturing method is provided to mass-produce grain type polysilicon by using a fluidized bed reactor. A fluidized bed reactor is composed of a reaction tube(2) and a reactor cell(1) for enclosing the reaction tube. The fluidized bed reactor has inner and outer regions. The pressure of the inner region of the fluidized bed reactor is directly/indirectly measured by using an inner pressure control unit. The pressure of the outer region of the fluidized bed reactor is directly/indirectly measured by using an outer pressure control unit. The difference of pressure between the inner and the outer regions is kept in a predetermined range by using a pressure difference control unit. A fluidized gas is supplied to a silicon grain layer of the reaction tube by using a fluidized gas injecting unit. A reaction gas containing silicon is supplied to the silicon grain layer by using a reaction gas injecting unit. The outer region is kept in an inert gas state. The silicon grain layer is heated by using a heating unit. At this time, a grain type polysilicon is completed in the fluidized bed reactor.