发明名称 |
Pattern measurement method, manufacturing method of semiconductor device, pattern measurement apparatus, and program |
摘要 |
A pattern measurement method includes acquiring graphic data of a plurality of patterns including image data; processing the graphic data to detect a coordinate of an edge point of the pattern; combining the edge points between the patterns to make a pair of edge points and calculating a distance between the edge points constituting each pair of edge points and an angle between a straight line which connects the edge point to the other edge point and an arbitrary axial line with respect to each pair of edge points to prepare a distance angle distribution map which is a distribution map of the calculated distance and angle of the pair of edge points; and evaluating at least one of a relation of shape between the patterns, a relation of size between the patterns, and a relative location between the patterns on the basis of the prepared distance angle distribution map.
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申请公布号 |
US7151855(B2) |
申请公布日期 |
2006.12.19 |
申请号 |
US20030670387 |
申请日期 |
2003.09.26 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MITSUI TADASHI |
分类号 |
G01B11/00;G06K9/46;G01B11/24;G06K9/48;G06T1/00;G06T7/00;G06T7/60;H01L21/66 |
主分类号 |
G01B11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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