SPECIMEN FOR TEM AND METHOD OF MANUFACTURING THE SAME

摘要

A specimen for TEM(Transmission Electron Microscope) and a method for manufacturing the same are provided to reduce a time for analyzing pattern wafers by analyzing simultaneously at least four or more pattern wafers. A specimen for TEM includes sectional specimens having analyzing sides which are arranged in parallel with each other. A plurality of analyzing lines(180) have predetermined width and are extended in a parallel direction. An analyzing region(150) is extended along a predetermined direction vertical to the extending direction of the analyzing lines. A peripheral region(160) is formed around the analyzing region. Each of the analyzing lines is attached to each other so that a pair of analyzing sides are opposite to each other.