| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a beam shape detector of a laser beam capable of appropriately evaluating the shape of the laser beam applied to a worked section. <P>SOLUTION: A beam shape display 100 of the laser beam comprises a beam splitter 20 that reflects incident laser beams 2 partially and transmits the remainder, a lens system 30 for converting the laser beams 2 reflected by the beam splitter 20 to parallel laser beams, a CCD sensor 40 for receiving the parallel laser beams, and a display 51 for displaying the light reception result of the CCD sensor 40. In this case, the lens system 30 is composed of a linear guiding device 33 so that the lens system 30 can be positioned freely in the O direction of the center axis in the lens system 30. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
