| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a Z-axis adjustment mechanism for improving stiffness in a Z-axis direction, and to provide a micromotion stage utilizing the Z-axis adjustment mechanism. <P>SOLUTION: The Z-axis adjustment mechanism 22 supports a stage 25 arranged on a base plate 21, and adjusts the arrangement relationship to the base plate of the stage in a Z-axis direction orthogonally crossing a main surface 21a of the base plate. The Z-axis adjustment mechanism 22 comprises a piezo actuator P4 that is arranged vertically on the base plate and expands and contracts in a Z-axis direction; a base member 50 that has a guide 52 extended in a Z-axis direction and is fixed on the main surface; and a support member 80 that is mounted to the tip of the piezo actuator and supports the stage, and then is slidably mounted to the guide in a Z-axis direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
