| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machine capable of easily forming a hole of an arbitrary shape with high quality. <P>SOLUTION: In a first reflection mirror 210, one end of a piezoelectric body 212 is joined with the opposing face 210B of a reflection surface 210A, and the other end of the piezoelectric body 212 is fixed to a fixed part 214. By vibrating the piezoelectric body 212, the first reflection mirror 210 is vibrated in the Y-axis direction. A second reflection mirror 220 is displaceable in the X-axis direction orthogonal to the Y-axis direction. One end of a piezoelectric body 222 is joined with the opposing face 220B of a reflection surface 220A and the other end of the piezoelectric body 222 is fixed to a fixed part 224. The first reflection mirror 210 is vibrated in the form of Y=ASin(ωt) in the Y-axis direction, and the second reflection mirror 220 is vibrated in the form of X=ACos(ωt) in the X-axis direction. When the synchronized vibrations in the Y-axis direction and the X-axis direction are synthesized, the respective laser beams L depict a circular track of a radius A (amplitude A), and a plurality of holes of the radius A are simultaneously formed. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
