MANUFACTURING METHOD OF PIEZOELECTRIC RESONATOR CHIP, PIEZOELECTRIC RESONATOR CHIP, PIEZOELECTRIC DEVICE, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric resonator chip enhancing accuracy of exposure applied to a tuning part, in a photolithography process in forming electrodes when forming the downsized tuning fork type piezoelectric resonator chip.

SOLUTION: The manufacturing method of the piezoelectric resonator chip disclosed herein is characterized in that the method executes exposure while bringing a mask 20 into contact with a resist 19 formed to the electrode forming face of the piezoelectric resonator chip 10 and inclining a light source 30 so that an emitted light applied to the tuning part 16 formed between a plurality of resonator arms is closer to the direction of vertical emission, in the photolithography process at electrode formation in the case of manufacturing the piezoelectric resonator chip provided with the resonator arms for forming the tuning fork type.

COPYRIGHT: (C)2007,JPO&INPIT