| 摘要 |
PROBLEM TO BE SOLVED: To provide a reliability verification apparatus of a semiconductor integrated circuit device performing the reliability verification of electromigration by mean current values, maximum current values and root-mean-square current values with high accuracy and efficiency. SOLUTION: A mean current value is calculated by a mean current calculation part 201 on the basis of a load capacity value and an output through rate, and a maximum current value is calculated by a maximum current calculation part 206 only to acceptable cells having the calculated mean current value that is a permissible mean current value or less. An RMS current value is calculated by an RMS current calculation part 211 only to the acceptable cells having the calculated maximum current value that is the permissible maximum current value or less. Whether the calculated RMS current value is the permissible RMS current value or less is verified, and the violated cells exceeding the permissible value in the verification of the mean current value (and the maximum current value) are excluded from the objects for calculation and verification of the maximum current value (and the RMS current value). COPYRIGHT: (C)2007,JPO&INPIT
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