LIMITING CURRENT SYSTEM GAS SENSOR, ITS MANUFACTURING METHOD, GAS LEAK DETECTOR, AND GAS CONCENTRATION MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a miniaturizable limiting current system gas sensor capable of confirming easily a conductive part disconnection.

SOLUTION: This limiting current system gas sensor has a solid electrolyte substrate wherein an anode electrode is formed on one surface and a cathode electrode is formed on the other surface respectively; a ceramics substrate wherein one surface is faced to one surface of the solid electrolyte substrate and a terminal for the anode electrode and a terminal for the cathode electrode are formed on the other surface; a bonding material formed between the solid electrolyte substrate and the ceramics substrate; a diffusion chamber formed from the solid electrolyte substrate, the ceramics substrate and the bonding material; a tube as a diffusion rate determining hole communicating the diffusion chamber with the outside; a notched part formed on one end of the ceramics substrate, wherein the notched face is covered with a conductive part connected to the terminal for the anode electrode on the ceramics substrate and the anode electrode on the solid electrolyte substrate; and the conductive part formed on the other end of the ceramics substrate, and connected to the terminal for the cathode electrode on the ceramics substrate and the cathode electrode on the solid electrolyte substrate.

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