| 摘要 |
The present invention relates to a substrate conveyance apparatus ( 200 ). The apparatus includes a main frame ( 230 ), a substrate support device ( 240 ) and a base plate ( 210 ). The substrate support device includes robot blades ( 141 a, 141 b) and a holding chuck ( 145 ). The holding chuck is movably connected with main frame so as to hold the robot blades. The robot blades are comprised of two pair of plate-shaped members, and the base plate is used to support the main frame. The distance between one pair of plate-shaped members is different from that of the other pair of plate-shaped members. The substrate conveyance apparatus is used to load/unload the substrates with different sizes.
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