发明名称 Mis transistor and cmos transistor
摘要 A MIS transistor, formed on a semiconductor substrate, assumed to comprise a semiconductor substrate ( 702, 910 ) comprising a projecting part ( 704, 910 B) with at least two different crystal planes on the surface on a principal plane, a gate insulator ( 708, 920 B) for covering at least a part of each of said at least two different crystal planes constituting the surface of the projecting part, a gate electrode ( 706, 930 B), comprised on each of said at least two different crystal planes constituting the surface of the projecting part, which sandwiches the gate insulator with the said at least two different planes, and a single conductivity type diffusion region ( 710 a, 710 b, 910 c, 910 d) formed in the projecting part facing each of said at least two different crystal planes and individually formed on both sides of the gate electrode. Such a configuration allows control over increase in the element area and increase of channel width.
申请公布号 US2006278909(A1) 申请公布日期 2006.12.14
申请号 US20060560706 申请日期 2006.07.24
申请人 NISHIMUTA TAKEFUMI;MIYAGI HIROSHI;OHMI TADAHIRO;SUGAWA SHIGETOSHI;TERAMOTO AKINOBU 发明人 NISHIMUTA TAKEFUMI;MIYAGI HIROSHI;OHMI TADAHIRO;SUGAWA SHIGETOSHI;TERAMOTO AKINOBU
分类号 H01L27/092;H01L29/94;H01L21/8238;H01L29/78 主分类号 H01L27/092
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