| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device which is easy in assembling, and has good property while holding airtightness of a space in which a piezoelectric element is arranged in the piezoelectric device using a resin substrate. SOLUTION: The device is provided with a mounting electrode 13 formed on the first resin substrate 10; a crystal oscillating piece 14 connected to the mounting electrode 13; a sealing viahole 20 of a circular shape which penetrates the resin substrate 10; a conducting viahole 22 which conducts with the mounting electrode 13, and penetrates through the first resin substrate 10 and a second resin substrate 11; a lid which is composed of a sealing ring 17 which closely contacts with the sealing viahole 20 with a space kept in which the crystal oscillating piece 14 is arranged, and a cover plate 18; and a metal layer 21 which is formed between the first resin substrate 10 and the second resin substrate 11, corresponding to a region enclosed by the sealing viahole 20 and excluding a periphery of the conducting viahole 22. A space which is formed between the lid and the first resin substrate 10 is kept airtight by closely contacting the lid and the sealing viahole 20, and the sealing viahole 20 and the metal layer 21. COPYRIGHT: (C)2007,JPO&INPIT
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