| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater with high durability where local overheat of a ceramic heating element arranged in the ceramic heater can be prevented and the temperature of the tip surface of the ceramic heater becomes a maximum temperature. SOLUTION: The ceramic heater 1 has a ceramic substrate 13 with a rod shape in the axial direction, and the ceramic heating element 10 that is buried in the ceramic substrate 14 and performs resistance heating. In the ceramic heating element 10 of the ceramic heater 1, the cross sectional shape of the top 10c of a U-shaped turn around section 10a is set so that the area on the inner diameter side is large, thereby dispersing the part having the maximum temperature. COPYRIGHT: (C)2007,JPO&INPIT
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