| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thin film piezoelectric resonator equipped with an exciting unit which is provided on a cavity or a sound reflecting layer, improved in crystallinity, and set uniform in capacitance and to provide a filter. <P>SOLUTION: The thin film piezoelectric resonator 1 is equipped with a board 2 provided with a first cavity 21 and a second cavity 23; a first exciting unit 71 which is provided on the first cavity 21 and equipped with a peripheral profile specified by an overlapping region composed of a first electrode 4, a first piezoelectric body 5, and a second electrode 6 which are successively laminated; and a second exciting unit 73 which is provided on the second cavity 23 and equipped with a peripheral profile specified by an overlapping region composed of a third electrode 4, a second piezoelectric body 5, and a fourth electrode 6 which are successively laminated. An average distance d1 between the end of the first exciting unit 71 and the opening end of the first cavity 21 is set different from an average distance d2 between the end of the second exciting unit 73 and the opening end of the second cavity 23. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
