| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact type worked surface evaluator for giving a highly reliable measurement result, having no restraint imposed thereon as to a measuring object, and moreover, being used for evaluating roughness, etc. of a member surface in a relatively short period of time. SOLUTION: This evaluator is equipped with: a light source for substantially vertically projecting light from a back surface of a replica, which corresponds to a surface reverse to a reflective surface, toward the reflective surface, with the replica having the reflective surface for reflecting the conditions of the worked surface; a microscope for receiving, by its light receiving surface, transmitted light projected and transmitted by the replica; a domain/shape determination part 501 for determining a domain where transmitted light of intensity not less than a prescribed value reaches out of a domain where transmitted light reaches on the receiving surface; and a roughness determination part 503 for determining the roughness of the worked surface based on the domain of the receiving surface determined by the determination part 501. COPYRIGHT: (C)2007,JPO&INPIT
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