METHOD OF MANUFACTURING SUBSTRATE HAVING NANO ROD STRUCTURE

摘要

A method fot manufacturing a substrate having nano rod structure is provided to prevent the pollution of a nano rod caused by a metal catalyst without using the metal catalyst. A substrate(100) is loaded in a chamber of an MOCVD(Metal Organic Chemical Vapor Deposition) apparatus. The substrate is then heated. Crystalline nucleuses(210) are formed on the substrate by injecting a Ð -group precursor in the chamber. A plurality of nano rods(220) are grown on the crystalline nucleuses. The nano rods are spaced apart from each other.