| 摘要 |
Provided are a terminal structure capable of preventing damage due to an excessive force and having high sealing property, and a vacuum pump to which the terminal structure is applied. When a control device (400) undergoes transition to a turbo molecular pump main body (300), a cylindrical wall (603) of a female connector (600) is fit-engaged with a cavity (504) of a male connector (500) . As the connection progresses, head portions (511a) at one ends of male pins (511) are inserted into pin insertion elongated holes (624). When, after that, a forward end of the cylindrical wall (603) of the female connector (600) abuts a bottom portion (501) of the male connector (500), the female connector (600) on the control device (400) side, which is of low rigidity, is pushed back against an elastic force of waved washers (613). As a result, even when an excessive force is applied to the female connector (600) and the male connector (500), the force can be mitigated through deformation of the waved washers (613), so there is no fear of the connectors suffering damage.
|
