FORK FOR TRANSFERING WAFER

摘要

A fork for transmitting a wafer is provided to prevent the wafer from being dropped. A vacuum line is formed at a fork portion(40). The fork portion has a narrow plate shape. Rubbers(42) are installed at both ends of the fork portion and support a wafer(46) in order to prevent the wafer from being slid. A body is integrally connected with the fork portion and supports the fork portion. A vacuum line is formed at the body. Two forks are formed to be spaced apart from each other at the fork portion. The body and the pork portion made of ceramic materials. The rubber is inserted and fixed in holes(52), which are formed at both ends of the pork portion. A lower surface(50) of the rubber has a diameter greater than that of the holes.