发明名称 Optical scanner with curved mirror and method of manufacturing the same
摘要 An optical scanner and a method of manufacturing the same are provided. The optical scanner comprises a rectangular frame, a H-shaped stage, which is linearly driven in a second direction perpendicular to a first direction of a central axis inside the frame and includes a central area positioned in a direction of the central axis and four extended areas that extend from both opposite sides of the central area parallel to the central axis, a cylindrical mirror, which is disposed on the central area and scans a laser beam incident on the surface thereof in the second direction, torsion bars, which are disposed on the central axis and support the stage by connecting the frame and the central area of the stage, and a stage driving structure, which includes driving comb electrodes formed at both long sides of the stage and fixed comb electrodes formed at corresponding sides of the frame, parallel to the first direction.
申请公布号 US7149022(B2) 申请公布日期 2006.12.12
申请号 US20040872480 申请日期 2004.06.22
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 MUN YONG-KWEUN;LEE JU-HYUN;KO YOUNG-CHUL;LEE JIN-HO
分类号 G02B26/08;B81B3/00;B81C1/00;G02B26/10 主分类号 G02B26/08
代理机构 代理人
主权项
地址