CMP POROUS PAD WITH COMPONENT-FILLED PORES,申请号IL20060176955-传众专利搜索

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发明名称	CMP POROUS PAD WITH COMPONENT-FILLED PORES
摘要
申请公布号	IL176955(D0)	申请公布日期	2006.12.10
申请号	IL20060176955	申请日期	2006.07.19
申请人	CABOT MICROELECTRONICS CORPORATION	发明人
分类号	B24B37/04;B24D3/32;C09G;C09G1/02;H01L21/321	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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