| 摘要 |
PROBLEM TO BE SOLVED: To control, with high accuracy, positions of fine structures and relative positions among the structural elements forming the fine structures. SOLUTION: Standing wave of surface elastic wave is generated on the surface of substrate and the position where material of the fine structures adheres, namely the position of the fine structure, is set in accordance with the standing wave. COPYRIGHT: (C)2007,JPO&INPIT |
