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发明名称
RADIKAL-UNTERSTÜTZTE SEQUENTIELLE GASPHASENABSCHEIDUNG
摘要
申请公布号
DE60027401(T2)
申请公布日期
2006.12.07
申请号
DE20006027401T
申请日期
2000.02.01
申请人
GENUS INC.
发明人
SNEH, OFER
分类号
H01L21/44;C23C16/00;C23C16/08;C23C16/18;C23C16/30;C23C16/40;C23C16/44;C23C16/452;C23C16/455;H01L21/285;H01L21/314;H01L21/316
主分类号
H01L21/44
代理机构
代理人
主权项
地址
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