| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding wheel which is used to grind a plate shape workpiece, does not cause polishing unevenness, and has excellent pressure response. SOLUTION: In the grinding wheel for polishing, a porous elastic body 2 is provided on a cylindrical core material 1, and a polishing layer 4 is provided on the outer periphery of the porous elastic body 2 which is a rubber sponge. The rubber sponge 2 has a rubber hardness of 5 to 40 by C scale of a rubber hardness tester, and preferably has a restitution elasticity of 50 to 90%. Additionally, it is preferable that 25% compression load value defined by JIS K6767 is 0.010 to 0.200 MPa. COPYRIGHT: (C)2007,JPO&INPIT
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