CHIP AND MICROANALYZING METHOD

摘要

PROBLEM TO BE SOLVED: To concentrate a minor component with good reproducibility using a microchip. SOLUTION: A flow channel 13 is formed to the surface of a silicon substrate 11 by ICP processing. A weir part 14 is provided to the flow channel 13 and a plurality of communication flaw channels 15 for allowing the flow channels 13a and 13b divided by the weir part 14 to communicate with each other are provided in the weir part 14. An adsorbing part 16 comprising an adsorbent such as activated carbon is formed before the weir part 14. The silicon substrate 11 provided with the flow channel 13 thus constituted is anodically joined to a glass plate 12a to be constituted as the microchip 10. COPYRIGHT: (C)2007,JPO&INPIT