发明名称 DEVICE AND METHOD FOR OPTICALLY DETECTING OBJECT
摘要 PROBLEM TO BE SOLVED: To provide a device and a method for optically detecting an object. SOLUTION: The device (1) has an adjusting means (18) and at least one imaging optical component (6, 8, 9, 10, 11, 13, 15, 16, 17), specially, the imaging optical element (6) arranged on an irradiation optical path (4) and/or a detection optical path (5) is arranged rotatably around respective optical axes and/or pivotally around optical axes of the optical paths (4, 5) where the optical components (6, 8, 9, 10, 11, 13, 15, 16, 17) are arranged, and/or translatorily across the optical axes through the adjusting means (18), thereby detecting the object (2) by the optical components (6, 8, 9, 10, 11, 13, 15, 16, 17) being rotated, pivoted, and/or translated. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006330721(A) 申请公布日期 2006.12.07
申请号 JP20060131506 申请日期 2006.05.10
申请人 VISTEC SEMICONDUCTOR SYSTEMS GMBH 发明人 SULIK WOLFGANG;HANS-ARTUR BOESSER
分类号 G02B7/00;A01D27/04;G02B7/04 主分类号 G02B7/00
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