| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma treatment equipment which can easily make a change of antenna and a change of gap. <P>SOLUTION: The plasma treatment equipment 100 has hermetically constructed and grounded, substantially cylindrical chamber 1, and an antenna component 30 is located on the chamber 1. The chamber 1 has a divided construction which is composed of an almost cylindrical housing 2, and a cylindrical chamber wall 3 joined on the housing 2 surrounding the treatment space. The chamber wall 3 is detachable. <P>COPYRIGHT: (C)2007,JPO&INPIT |
