| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device which has flexibility without being dependent on the shape of a polishing object, and excellent polishing ability. SOLUTION: The polishing device is equipped with a workpiece holding member 11 holding a workpiece 10, a polishing tool 300 which has a polishing agent 12A constituted by including an electric rheology gel (ERG) and abrasive grains, and polishes the workpiece 10 by contacting the polishing agent 12A to the workpiece 10, a tool holding member 310 holding the polishing tool 300, a rotating drive means 450 driving to rotate the polishing tool 300 or the workpiece 10 around the shaft approximately orthogonal to the polishing surface, and a voltage apply means 123 applying the voltage to the ERG. COPYRIGHT: (C)2007,JPO&INPIT
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